Compatibility starts with the exact instrument model and calibration method.
“Surfscan-compatible” is too broad. Identify the platform, wafer handling, recipe, particle range and certificate requirement.
Model identification
Provide the complete model and relevant configuration. Applied Physics documentation references SP1, SP2, SP3 and SP5 applications, but the current recipe and platform configuration still control the selection.
Wafer and handling inputs
- Wafer diameter
- Silicon or other substrate
- Notch or flat
- Film or bare surface
- Front-side or other inspection requirement
- Robot and carrier constraints
Optical and recipe inputs
Specify the target particle-size range, channels, calibration points and whether the purpose is sensitivity verification, response calibration or process study.
Do not purchase from a generic matrix alone
A compatibility matrix is a starting point. Final selection should be reviewed against the instrument manual, current recipe and supplier certificate.
Need help matching equipment to the study?
Applied Physics can review the airflow area, test objective, desired visibility, operating duration and deployment constraints.
Talk with Applied Physics