PSL calibration wafers translate controlled particle size into a repeatable inspection response.
The strongest specification links particle sizes and deposition design directly to the instrument recipe and calibration objective.
Why PSL is widely used
Polystyrene latex spheres are available in controlled nominal sizes and are commonly used as particle-size references. Their optical response and deposition behavior must still be evaluated against the specific inspection system.
Instrument and recipe inputs
- Inspection-system manufacturer and model
- Wafer diameter and handling configuration
- Recipe, channel or sensitivity range
- Nominal PSL sizes
- Spot locations or deposition pattern
- Target counts or density
Traceability language
Request the exact traceability statement and supporting certificate. Avoid replacing a documented traceability chain with vague language such as “NIST approved.”
Applied Physics reference
Applied Physics technical documentation describes PSL sphere applications for KLA-Tencor SP-series inspection platforms. Review the PSL spheres technical document and confirm the current product configuration with technical sales.
Need help matching equipment to the study?
Applied Physics can review the airflow area, test objective, desired visibility, operating duration and deployment constraints.
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