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Deposition pattern determines what the inspection method can learn.

Select spot, full or patterned deposition around the calibration, challenge or mapping objective.

Published: August 6, 2026Reviewed by: Applied Physics Technical Editorial TeamPublisher: Applied Physics Corporation
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Localized standards

Spot deposition

Defined spots can support multiple particle sizes or controlled locations on one wafer. They simplify correlation but must align with the instrument’s scan and recipe.

Distributed standards

Full-surface deposition

Broader distribution may support uniformity, recovery or process-challenge studies. Count density and background become especially important.

Custom geometry

Patterned deposition

Custom locations can support mapping, edge-versus-center response, handling studies or tool-specific procedures. Provide a clear deposition map.

Quality control

Verification after deposition

The certificate should distinguish target deposition from measured results and identify the inspection method used for verification.

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